LIN, W.-C.; LIU, T.-H. The Design of High-End Pressure Control Valve (PCV) Control System with DeviceNet Interface in Semiconductor Wafer Foundry. Asian Journal of Applied Sciences, [S. l.], v. 4, n. 2, 2016. Disponível em: https://ajouronline.com/index.php/AJAS/article/view/3787. Acesso em: 28 mar. 2024.