Optical and Defect Properties in Nearly Stochiometry ZnO Film Coated on Si (111) by Ultrasonic Spray Pyrolysis Method


  • Bambang Soegijono Departement of Physics, Universitas Indonesia, Indonesia
  • Hamdan AKbar Notonegoro Department of Mechanical Engineering, Universitas Sultan Ageng Tirtayasa, Indonesia
  • Iwan Sugihartono Departement of Chemistry, Universitas Indonesia, Indonesia
  • Emil Budianto Departement of Chemistry, Universitas Indonesia Depok, Indonesia
  • Muhamad Riza Iskandar 5Central Facility for Electron Microscope, RWTH Aachen University, Germany




Keywords— ZnO film, Ultrasonic Spray Pyrolysis , Defect, optical


ZnO is one of ceramic semiconductor material, which has interesting properties due its wide bandgap energy (3.4 eV), and it may be used in many optoelectronic devices. Optical and Defects properties of ZnO  could affect the properties of the devices. ZnO films have been deposited on Si (111) substrate by ultrasonic spray pyrolysis (U.S.P.) method at temperatures 400oC, 450oC, and 500oC. The samples consist of two part, annealed and non-annealed heat treatment. The annealed treatment was conducted at temperature 800oC for 2 hours. The XRD pattern revealed that the ZnO film is a polycrystalline. The T.E.M. characterization showed that non stochiometry of the ZnO film present. From the UV-vis pattern, the transition of electrons is affected by the defect present. The ZnO films show a characteristic luminescence properties. It found three defects, there are oxygen vacancies (Vo), oxygen interstitial (Oi), and an electron transition from the level of the ionized oxygen vacancies to the valence band, that is responsible for green band emission.



M.A Borysiewicz, ZnO as a Functional Materials: A Review, Crystals, 9(10), 505, 2019

X. W. Sun and H. S. Kwok, J. Appl. Phys. 86, 408-411 (1999)

Segawa Y, Ohtomo A, Koinuma M, Tang ZK, Yu P, Wong GKL., Phys Stat Sol (b), 202:669 (1997)

S.T. Tan, B. J. Chen, X. W. Sun, W. J. Fan, H. S. Kwok, X. H. Zhang, and S. J. Chua, J. App. Phys. 98, 013505 (2005)

K.K. Kim, J.H. Song, H.J. Jung, W.K. Choi, S.J. Park, J.H., Song, J. Appl. Phys. 87, 3573(2000).

X. W. Sun and H. S. Kwok, J. Appl. Phys. 86, 408 (1999)

N. Izyumskaya, V. Avrutin, U. Ozgur, Y.I. Alivov, and H. Morkoc, Phys. stat. sol. (b) 244, p. 1439-1450 (2007)

J.L. Zhao, X.W. Sun, S.T. Tan, G.Q. Lo, D.L. Kwong, Z.H. Cen, Appl. Phys. Lett. 91, 263501, (2007).

S. Iwan, S. Bambang, J. L. Zhao, S. T. Tan, X. W. Sun, G.Q. Lo, H. M. Fan, L. Sun, S. Zhang, Physica B, 407, 2721-2724 (2012)

P.T. Hsieh, Y.C. Chen, K.S. Kao, M.S. Lee, C.C. Cheng, J. European Ceramic Society, 27, 3815-3818 (2007)

A. van Dijken, E.A. Meulenkamp, D. Vanmaekelbergh, A. Meijerink, J. Luminescence 20, 123-128 (2000)

Q.P. Wang, D.H. Z.Y. Z.Y. Xue, and X.T. Hao, Appl. Surface Science 201, p.123-128 (2002)

D. C. Look, B. Claflin, Ya. I. Alivov, and S. J. Park, Phys. Stat. sol. (a) 201, 2203–2212 (2004).

X.M. Fan, J.S. Lian, Z.X. Guo, and H.J. Lu, Appl. Surface Science 239, p.176-181 (2005)

B. Lin, Z. Fu, Y. Jia, Appl. Phys. Lett. 79, 943 (2001)

M. Liu, A.H. Kitai, P. Mascher, J. Luminescence 54, 35 (1992)

Y.M. Sun, Ph.D. Thesis, University of Science, and Technologyof China (2000).

Iwan Sugihartono, Bambang Soegijono, M. Hikam, E. Handoko, Fan H.M, S.T. Tan, X.W. Sun, 2013 International Confrence on QiR, p. 232-234 (2013)

D.H. Zhang, Z.Y. Xue, Q.P. Wang, J. Ma, Proc. SPIE 4918, 425 (2002)

K. Vanheusden, W.L. Warren, C.H. Seage, D.R. Tallent, J.A.Voigtang, B.E. Gnade, J.Appl. Phys. 79, 7983 (1996).




How to Cite

Soegijono, B., Notonegoro, H. A., Sugihartono, I., Budianto, E., & Iskandar, M. R. (2020). Optical and Defect Properties in Nearly Stochiometry ZnO Film Coated on Si (111) by Ultrasonic Spray Pyrolysis Method. Asian Journal of Applied Sciences, 8(4). https://doi.org/10.24203/ajas.v8i4.6291




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